Semiconductor Equipment
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Semiconductor Equipment

ArF Scanners
(193nm wavelength)

ArF Scanners <br>(193nm wavelength)
Ultra-high optical and electromechanical precision for high volume production of chip layers.

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KrF Scanners
(248nm wavelength)

KrF Scanners <br>(248nm wavelength)
IC production tools with technological advancements that support sub-wavelength techniques.

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i-line Scanners
(365nm wavelength)

i-line Scanners <br>(365nm wavelength)
Cost effective solution for imaging less critical layers within an IC device.

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