Singapore
FPA-5550iZ
Enhanced throughput with stability requirements for memory manufacturing
The FPA-5550iZ combines high throughput, the ability to expose a scan field in a single shot, and a proven cost-effective platform. You’ll enjoy greater work efficiency than ever.
- Numerical aperture: 0.45 - 0.57
- Wafer size: 300mm
- Resolution: ≤ 0.35µm
|