Singapore
FPA-5550iZ
Enhanced throughput with stability requirements for memory manufacturing
The FPA-5550iZ combines high throughput, the ability to expose a scan field in a single shot, and a proven cost-effective platform. You’ll enjoy greater work efficiency than ever.
- Resolution: ≤ 0.35 µm
- Numerical aperture: 0.45 ∼ 0.57
- Wafer size: 300 mm
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