Singapore
FPA-5510iZ
A perfect mix-and-match for 200mm and 800mm DUV scanners
The FPA-5510iZ is a high throughput 4x i-line stepper that delivers a significant CoO advantage. It offers a cost-effective solution for imaging less critical layers within an IC device.
- Resolution: ≤ 0.28 µm
- Numerical aperture: 0.45 ∼ 0.57
- Wafer size: 300 mm, 200 mm
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