Singapore
FPA-5510iZ
A perfect mix-and-match for 200mm and 300mm DUV scanners
The FPA-5510iZ is a high throughput 4x i-line stepper that delivers a significant CoO advantage. It offers a cost-effective solution for imaging less critical layers within an IC device.
- Numerical aperture: 0.45 - 0.57
- Wafer size: 300mm, 200mm
- Resolution: ≤ 0.28µm
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