Semiconductor equipment - FPA-5500iX - Canon Singapore

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FPA-7000AS7
FPA-7000AS5
FPA-6000ES6a
FPA-5000ES4b
FPA-5550iZ
FPA-5510iZ
FPA-5500iX
FPA-3000i5+

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FPA-5500iX

A solution for CCD / LCD production

The FPA-5500iX is a semiconductor equipment that offers the perfect solution for your CCD / LCD production. It has a huge exposure field and high throughput for maximum production.

Resolution: 0.50 µm
Numerical aperture: 0.28 ∼ 0.37
Wafer size: 300 mm, 200 mm

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FPA-5500iX

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FPA-5500iX	i-Line (365nm) Stepper
Resolution	0.50µm
NA	0.37 ~ 0.28 (Automatically Variable)
Reticle Size	6-in. (0.25-in. thick)
Reduction Ratio	2:1
Field Size	50mm x 50mm
Overlay Accuracy	(M+3σ) ≤ 60nm
Throughput	160wph (8-in) 120wph (12-in)

A solution for CCD / LCD production

Specifications for FPA-5500iX

FPA-5500iX

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