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FPA-3000i5+

High productivity partner

The FPA-3000i5+ is a high productivity machine for your business needs. Its wide-field lens with extra NA variability supports a variety of fine patterning processes, making this product a bestseller.
  • Numerical aperture: 0.45 - 0.63
  • Wafer size: 200mm, 150mm
  • Resolution: ≤ 0.35µm
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FPA-3000i5+ - Canon Singapore - Business
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